Silicon wafer

Silicon wafer

A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.

Industry: Semiconductors

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Silicon wafer

Process used to fabricate bonded SOI substrates by cleaving the top wafer close to the desired thickness of the active layer. Before bonding, one wafer is implanted with hydrogen to a depth that will ...

single-crystal

Semiconductors; Silicon wafer

Crystalline solid in which atoms are arranged following specific pattern throughout the entire piece of material; in general, single crystal material features superior electronic and photonic ...

slicing

Semiconductors; Silicon wafer

Term refers to the process of cutting of the single-crystal ingot into wafers; high precision diamond blades are used.

single wafer process

Semiconductors; Silicon wafer

Only one wafer is processed at the time; tools that are designed specifically for single-wafer processing become more common as wafer diameter increases.

site flatness

Semiconductors; Silicon wafer

The TIR or the maximum FPD of the portion of a site which falls within the FQA.

separation by implantation of oxygen (SIMOX)

Semiconductors; Silicon wafer

Oxygen ions reimplanted into Si substrate and form a buried oxide layer. SIMOX is a common technique when building SOI wafers.

silicon

Semiconductors; Silicon wafer

The most common semiconductor, atomic number 14, energy gap Eg=1. 12 ev-indirect bandgap; crystal structure- diamond, lattice constant 0. 543 nm, atomic concentration 5x1022 atoms/cm, index of ...