Silicon wafer

Silicon wafer

A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.

Industry: Semiconductors

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Silicon wafer

chemical mechanical polishing (CMP)

Semiconductors; Silicon wafer

A process for removal of surface material from the wafer which uses chemical and mechanical actions to achieve a mirror-like surface for subsequent processing.

chuck mark

Semiconductors; Silicon wafer

Any physical mark on either surface of a wafer caused by robotic end effector, chuck, or wand.

crystal

Semiconductors; Silicon wafer

Solid featuring periodic spatial arrangement of atoms throughout the entire piece of material.

Enclosed ultra-clean space necessary for semiconductor manufacturing. Airborne particles are removed from the space to specified minimum levels, room temperature and humidity are strictly controlled; ...

boron

Semiconductors; Silicon wafer

Element from group III of the periodic table; acts as an acceptor in silicon; Boron is the only p-type dopant used in silicon device manufacturing.

bonded SOI

Semiconductors; Silicon wafer

SOI substrate formed by bonding two silicon wafers with oxidized surfaces such that one wafer is formed with an oxide layer sandwiched between two layers of Si; one wafer is subsequently polished ...

boat

Semiconductors; Silicon wafer

1. A device made of high purity temperature resistant materials such as fused silica, quartz, poly Si, or sic designed to hold many semiconductor wafers during thermal or other processes; 2. Device ...