Silicon wafer

Silicon wafer

A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.

Industry: Semiconductors

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Silicon wafer

hexamethyldisilizane (HMDS)

Semiconductors; Silicon wafer

A material that mproves adhesion of photoresist to the surface of a wafer; especially designed for adhesion of photoresist to sio2; deposited on wafer surface immediately prior to deposition of ...

haze

Semiconductors; Silicon wafer

Non-localized light scattering resulting from the surface topography (micro roughness) or from dense concentrations of surface or near-surface imperfections.

global flatness

Semiconductors; Silicon wafer

The TIR or the maximum FPD relative to a specified reference plane within the FQA.

focal plane

Semiconductors; Silicon wafer

The plane perpendicular to the optical axis of an imaging system which contains the focal point of the imaging system.

For wafer surfaces, the deviation of the front surface, expressed in TIR or maximum FPD,relative to a specified reference plane when the back surface of the wafer is ideally flat, as when pulled down ...

flat

Semiconductors; Silicon wafer

A portion of the periphery of a circular wafer that has been removed to a chord.

external, extrinsic gettering

Semiconductors; Silicon wafer

The process in which gettering of contaminants and defects in a semiconductor wafer is accomplished by stressing its back surface (by inducing damage or depositing material featuring different than ...