9 Terms
Home > Industry/Domain > Semiconductors > Silicon wafer
Silicon wafer
A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.
Industry: Semiconductors
Add a new termContributors in Silicon wafer
Silicon wafer
hexamethyldisilizane (HMDS)
Semiconductors; Silicon wafer
A material that mproves adhesion of photoresist to the surface of a wafer; especially designed for adhesion of photoresist to sio2; deposited on wafer surface immediately prior to deposition of ...
haze
Semiconductors; Silicon wafer
Non-localized light scattering resulting from the surface topography (micro roughness) or from dense concentrations of surface or near-surface imperfections.
global flatness
Semiconductors; Silicon wafer
The TIR or the maximum FPD relative to a specified reference plane within the FQA.
focal plane
Semiconductors; Silicon wafer
The plane perpendicular to the optical axis of an imaging system which contains the focal point of the imaging system.
flatness
Semiconductors; Silicon wafer
For wafer surfaces, the deviation of the front surface, expressed in TIR or maximum FPD,relative to a specified reference plane when the back surface of the wafer is ideally flat, as when pulled down ...
flat
Semiconductors; Silicon wafer
A portion of the periphery of a circular wafer that has been removed to a chord.
external, extrinsic gettering
Semiconductors; Silicon wafer
The process in which gettering of contaminants and defects in a semiconductor wafer is accomplished by stressing its back surface (by inducing damage or depositing material featuring different than ...
