Silicon wafer

Silicon wafer

A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.

Industry: Semiconductors

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Silicon wafer

total thickness cariation (TTV)

Semiconductors; Silicon wafer

The maximum variation in the wafer thickness. Total Thickness Variation is generally determined by measuring the wafer in 5 locations of a cross pattern (not too close to the wafer edge) and ...

total indicator reading (TIR)

Semiconductors; Silicon wafer

The smallest perpendicular distance between two planes,both parallel with the reference plane, which encloses all points on the front surface of a wafer within the FQA, the site, or the subsite, ...

thermal oxidation, thermal oxide

Growth of oxide on the substrate through oxidation of the surface at elevated temperature; thermal oxidation of silicon results in a very high quality oxide, sio2; most other semiconductors do not ...

test grade

Semiconductors; Silicon wafer

A virgin silicon wafer of lower quality than Prime, and used primarily for testing processes. SEMI indicates the bulk, surface, and physical properties required to label silicon wafers as "Test ...

target

Semiconductors; Silicon wafer

Source material used during evaporation or deposition; in sputtering, typically in the form of high purity disc; in e-Beam evaporation, typically in the form of a crucible. In thermal evaporation, ...

surface roughness

Semiconductors; Silicon wafer

Disruption of the planarity of the semiconductor surface;measured as a difference between highest and deepest surface features; can be as low as 0. 06nm or high quality Si wafers with epitaxial ...

surface damage

Semiconductors; Silicon wafer

Process related disruption of the crystallography order at the surface of single-crystal semiconductor substrates; typically caused by surface interactions with high energy ions during dry etching ...