Silicon wafer

Silicon wafer

A silicon wafer is a thin, circular slice of single-crystal semiconductor material used in manufacturing of semiconductor devices and integrated circuits.

Industry: Semiconductors

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Silicon wafer

sputtering target

Semiconductors; Silicon wafer

Source material during sputter deposition processes;typically a disc inside the vacuum chamber which is exposed to bombarding ions,knocking source atoms loose and onto samples.

Many (often) small single-crystal regions are randomly connected to form a solid; size of regions varies depending on the material and the method of its formation. Heavily-doped poly Si is commonly ...

sputtering

Semiconductors; Silicon wafer

Bombardment of a solid (target) by high energy chemically inert ions (e.g. Ar+); causes ejection of atoms from the target which are then redeposited on the surface of a substrate purposely located in ...

slurry

Semiconductors; Silicon wafer

A liquid containing suspended abrasive component; used for lapping, polishing and grinding of solid surfaces; can be chemically active; key element of CMP processes.

silicon-on-sapphire (SOS)

Semiconductors; Silicon wafer

Special case of SOI where an active Si layer is formed on top of a sapphire substrate (an insulator)by means of epitaxial deposition; due to a slight lattice mismatch between Si and sapphire, Si ...

slice orientation

Semiconductors; Silicon wafer

The angle between the surface of a slice and the growth plane of the crystal. The most common slice orientations are , and .

silicon-on-insulator (SOI)

Semiconductors; Silicon wafer

Silicon substrate of choice in future generation CMOS ics; basically a silicon wafer with a thin layer of oxide (sio2) buried in it; devices are built into a layer of silicon on top of the buried ...